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鍎�鍣ㄧ壒榛�
·鍏ㄥ井姗熸帶鍒剁郴绲�(t菕ng)锛岄浕鑵﹀弽鎺т竴鑷洪浕鑵﹀彲鎺у埗N锛�N鈮�253锛夎嚭鑹茶瓬鍎�锛屽叿鏈夊叚璺韩搴︽帶鍒剁郴绲�(t菕ng)锛涘洓璺檪闁撶▼搴忕郴绲�(t菕ng)銆�
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鍎�鍣ㄤ富瑕侀厤缃細 FPD + 姘ｉ珨閫�(j矛n)妯ｇ郴绲�(t菕ng) + SF6鍒囨彌鍙嶅惞绯荤当(t菕ng) + 鑹茶瓬鏌辩郴绲�(t菕ng)銆佺恫(w菐ng)绲�(lu貌)鍖栭浕鎺х郴绲�(t菕ng)銆佸収(n猫i)缃伐浣滅珯
鎶�琛�(sh霉)鍙冩暩(sh霉)
鐏劙鍏夊害妾㈡脯鍣紙FPD锛�
闈堟晱搴︼紙妾㈡脯闄愶級锛氣墹5.0×10-11g/s锛堟鍗佸叚鐑凤級
鍩虹窔鍣煶锛氣墹0.1mv
鍩虹窔婕傜Щ锛氣墹0.5mv/0.5h
婧害鑼冨湇锛氬婧互涓�8鈩�-400鈩�
婧帶绮惧害锛�±0.5%
绋嬪簭闅庢暩(sh霉)锛�8闅�
绋嬪崌閫熺巼锛�0-39鈩�/min锛堣(di脿o)绡�(ji茅)澧為噺0.1鈩�/min锛�
绋嬪簭鍗囨韩閲嶅京(f霉)鎬э細鈮�1锛�
妯�(bi膩o)姘ｅ娓瓬鍦�
妯�(bi膩o)姘ｏ細SO2F2(纭叞姘�):28ppm; S2OF2(浜炵～閰版盁):40ppm; S2OF10(鍗佹盁涓�姘у寲浜岀～):33ppm浣欙細SF6(鍏盁鍖栫～锛�
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